POLISHING SURFACE PLATE, APPARATUS AND METHOD OF SURFACE POLISHING

• Main Authors: FUKUSHIMA DAIJIRO, BANDO YUTAKA, TANABE KATSUJI, MATSUSHIMA YOHEI
• Format: Patent
• Language: English
• Published: 11.10.2007
• Subjects: DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a polishing surface plate by which various faults can be solved, and which can be manufactured at a low cost without increasing its size, and by which highly accurate one side surface polishing can be performed, a surface polishing apparatus, and a polishing method. SOLUTION: The surface plate body 21 of a polishing surface plate 20 to be used in a surface polishing apparatus 30 for surface-polishing the surface of a rectangular workpiece 1 has a polishing pad 22 stuck thereon. The outside dimension of the surface plate body 21 is formed to be within the range from 1/2 to 1/3 of the length of the short side of the rectangular workpiece 1. The surface polishing apparatus 30 has the polishing surface plate 20 arranged on the vertical axis having a Z axis with respect to the rectangular workpiece 1 arranged on a horizontal plane having an X axis and a Y axis, and drives the polishing surface plate 20 so as to move on the horizontal plane and in the direction of the vertical axis upward and downward, and carries out the control of pressure and rotation. Polishing is performed by combining a plurality of polishing patterns based on the results of the multiple regression from the polishing amount by a plurality of polishing patterns. COPYRIGHT: (C)2008,JPO&INPIT