APPARATUS AND METHOD FOR ANALYZING ACID CONCENTRATION IN MIXED ACID
PROBLEM TO BE SOLVED: To provide an analysis method capable of rapidly and precisely measuring a nitric acid concentration and a hydrofluoric acid concentration, even with respect to a mixed acid, such as an acid cleaning liquid or the like that contains metal ions. SOLUTION: The method for analyzin...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
27.09.2007
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide an analysis method capable of rapidly and precisely measuring a nitric acid concentration and a hydrofluoric acid concentration, even with respect to a mixed acid, such as an acid cleaning liquid or the like that contains metal ions. SOLUTION: The method for analyzing nitric acid concentration and hydrofluoric acid concentration uses an ion electrode method to analyze the mixed acid including nitric acid, hydrofluoric acid and the metal ions. An apparatus and the method for analyzing the nitric acid concentration and the hydrofluoric acid concentration in the mixed acid are characterized, in that a liquid prepared by removing the metal ions in the mixed acid is analyzed. Furthermore, the apparatus and the method for analyzing nitric acid concentration and hydrofluoric acid concentration in the mixed acid are characterized, in that an ion-exchange method, especially a Na +type positive ion-exchange resin is used to remove the metal ions in the mixed acid. COPYRIGHT: (C)2007,JPO&INPIT |
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Bibliography: | Application Number: JP20060072965 |