SCANNING ELECTRON MICROSCOPE

• Main Authors: TOGAWA KENICHI, GUNJI KAZUHIRO, YOSHIIE MITSUYOSHI, TAKADA SATORU
• Format: Patent
• Language: English
• Published: 20.09.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a scanning electron microscope with excellent focusing response, in one using an electromagnetic objective lens. SOLUTION: The scanning electron microscope is provided with a scanning means scanning electron beams over a sample, a detecting means detecting at least either secondary electron generated from the sample or reflective electron, a display means displaying a sample image produced based on signals detected by the detecting means, electromagnetic objective lenses giving the electron beams a focusing action to be focused on the sample, either magnetic paths of the objective lenses or electrodes arranged at the magnetic paths and electrically insulated, a voltage control means impressing voltage on the electrodes. It is so structured that the electrodes are arranged to accelerate at least either the secondary electron generated from the sample or the reflective electron so that energy of the electron beams passing through the objective lenses is heightened by voltage impressed by the voltage control means, and at the same time, a focusing position of the electron beams passing through the objective lenses is changed by the voltage control means. COPYRIGHT: (C)2007,JPO&INPIT