PLASMA GENERATING DEVICE

• Main Authors: MIKE MASAAKI, MATSUUCHI HIDETAKA, IWASAKI RYUICHI
• Format: Patent
• Language: English
• Published: 13.09.2007
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

PROBLEM TO BE SOLVED: To efficiently generate plasma by optimizing a position of slits for generating plasma, in a plasma generating device for making plasma gas based on microwave energy. SOLUTION: The plasma generating device is provided with a microwave generating device 20 (a microwave generating means) generating microwaves, and a third waveguide piece 13 (a waveguide) transmitting microwaves generated by the microwave generating means. The third waveguide piece 13 is provided at its one side face with at least one slit 31A fitted along a length direction of the waveguide piece 13 and forming a field concentration part based on the microwaves transmitted through the third waveguide piece 13, and a raw gas supply channel 32 supplying raw gas G to be made plasma at the field concentration part of the slit 31A. The slit 31A is fitted eccentrically from a side-face center line L of the third waveguide piece 13 extended along a length direction of the same 13. COPYRIGHT: (C)2007,JPO&INPIT