MINI ENVIRONMENT DEVICE, AND CLEAN ROOM EQUIPMENT USING SAME

• Main Authors: SUGANO WATARU, SUMINO MASAHITO
• Format: Patent
• Language: English
• Published: 30.08.2007
• Subjects: AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING; BASIC ELECTRIC ELEMENTS; BLASTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEATING; LIGHTING; MECHANICAL ENGINEERING; RANGES; SEMICONDUCTOR DEVICES; VENTILATING; WEAPONS

PROBLEM TO BE SOLVED: To provide a mini environment device capable of achieving a stable barometric condition in a mini environmental chassis by interlocking with opening/closing of an open/close lid of a load port without changing a flow rate or the like of a downflow from a fan filter unit (FFU), by controlling an exhaust quantity, preventing dust from scattering inside the mini environmental chassis, and achieving a stable and small-sized clean environment. SOLUTION: The mini environment device includes the fan filter unit placed on the top of the chassis provided in a clean room for flowing down clean air, the load port provided on the chassis for mounting a container containing a sample, an interface open/close lid for taking the sample from the container into the chassis, a pressure sensor for measuring air pressures inside and outside the chassis, an exhaust pressure controlling open/close lid for controlling the exhaust quantity of the clean air exhausted from the inside to the outside of the chassis, and a controller for controlling the open/close amount of the exhaust pressure controlling open/close lid. The open/close amount of the open/close lid is controlled in conjunction with the interface open/close lid to keep the inside of the chassis at a positive pressure. COPYRIGHT: (C)2007,JPO&INPIT