APPARATUS AND METHOD FOR CHARGED PARTICLE BEAM DRAWING, AND PROGRAM

PROBLEM TO BE SOLVED: To provide an apparatus and a method for improving fog correction accuracy. SOLUTION: This drawing apparatus 100 comprises a fog correcting irradiation computing unit 114 for computing amount of fog correcting irradiation including influence of the proximity effect in the elect...

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Bibliographic Details
Main Authors SUZUKI JUNICHI, EMI KEIKO, ABE TAKAYUKI
Format Patent
LanguageEnglish
Published 30.08.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide an apparatus and a method for improving fog correction accuracy. SOLUTION: This drawing apparatus 100 comprises a fog correcting irradiation computing unit 114 for computing amount of fog correcting irradiation including influence of the proximity effect in the electron beam drawing, a proximity effect correcting irradiation computing unit 116 for computing amount of proximity effect correcting irradiation for correcting the proximity effect mentioned above, a correcting irradiation combining unit 118 for combining amount of fog correcting irradiation and amount of proximity effect correcting irradiation, and a drawing unit 150 for drawing a sample 101 on the basis of the synthesized amount of correcting irradiation. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20060036639