VACUUM ROBOT

PROBLEM TO BE SOLVED: To provide a vacuum robot capable of changing the layout of a working stage arranged in a vacuum chamber in a compact manner. SOLUTION: In the vacuum robot 10, four driving shafts are concentrically arranged in a stand 11. A first driving shaft 21 turnably connects a first arm...

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Bibliographic Details
Main Authors NAKAMORI TAKAO, KATO KATSUHIKO, NAKANO KIYONORI
Format Patent
LanguageEnglish
Published 30.08.2007
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
HANDLING THIN OR FILAMENTARY MATERIAL
MANIPULATORS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a vacuum robot capable of changing the layout of a working stage arranged in a vacuum chamber in a compact manner. SOLUTION: In the vacuum robot 10, four driving shafts are concentrically arranged in a stand 11. A first driving shaft 21 turnably connects a first arm 12 to the stand 11; a second driving shaft 22 turnably connects a second arm 13 to the first arm 12; a third driving shaft 23 turnably connects a first hand 14 to the second arm 13; and a fourth driving shaft 24 turnably connects a second hand 15 to the second arm, respectively. The first driving shaft 21, the second driving shaft 22, the third driving shaft 23, and the fourth driving shaft 24 are driven by driving sources independent from each other, and a magnetic fluid seal 51 is attached to each of them. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20060042813