LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
PROBLEM TO BE SOLVED: To provide a lithographic apparatus that performs feedforward a control so as to appropriately compensate for the disturbance of a stage. SOLUTION: A lithographic apparatus includes a first control system CS1 to control a first physical quantity in the lithographic apparatus. A...
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Main Author | |
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Format | Patent |
Language | English |
Published |
23.08.2007
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Subjects | |
Online Access | Get full text |
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