DEVICE POWER SUPPLY SYSTEM FOR SEMICONDUCTOR TESTER AND VOLTAGE CORRECTION DATA GENERATING METHOD

• Main Authors: AOKI TAKUMI, GAMO TATSUHIRO
• Format: Patent
• Language: English
• Published: 16.08.2007
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a device power supply system for a semiconductor tester to suppress variation in power supply voltage for a testing-object semiconductor device without consuming extra current, and also to provide a voltage correction data generating method. SOLUTION: The device power supply system 1 for a semiconductor device comprises: a test pattern generator 2 generating a test pattern given to the testing-object semiconductor device 100, based on the designation of test data; a corrective voltage generator 3A generating a corrective voltage to suppress the variation in the power supply voltage which is imagined to occur in the semiconductor device 100 concurrently with the execution of a test using a test pattern generated by the pattern generator 2; and a device power supply unit 4 generating a power supply voltage to be given to the semiconductor device 100 by adding the corrective voltage generated by the voltage generator 3A to a prescribed voltage generated based on test data. COPYRIGHT: (C)2007,JPO&INPIT