VIBRATION CANCELLATION DEVICE

PROBLEM TO BE SOLVED: To provide a vibration cancellation device capable of damping an object to be damped operated in a vacuum atmosphere by a simple structure. SOLUTION: In this vibration cancellation device 1 having a vibration cancellation mechanism 9 supporting the object 13 to be damped in the...

Full description

Saved in:
Bibliographic Details
Main Authors KATAYAMA DAISUKE, HIRAI JUN, TOKIMASA YASUNORI
Format Patent
LanguageEnglish
Published 16.08.2007
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:PROBLEM TO BE SOLVED: To provide a vibration cancellation device capable of damping an object to be damped operated in a vacuum atmosphere by a simple structure. SOLUTION: In this vibration cancellation device 1 having a vibration cancellation mechanism 9 supporting the object 13 to be damped in the vacuum atmosphere, the mechanism 9 comprises a bellows joined body 15 which has a plurality of metal bellows 23, 27 with a support part 25 so interposed therebetween as to allow the metal bellows to communicate with each other and in which air is enclosed and a horizontal spring member 17 having one end fitted to the side surface of the support part 25 and elastically supporting the support part 25 in the direction perpendicular to the axial direction of the bellows joined body 15. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20060028320