VIBRATION CANCELLATION DEVICE
PROBLEM TO BE SOLVED: To provide a vibration cancellation device capable of damping an object to be damped operated in a vacuum atmosphere by a simple structure. SOLUTION: In this vibration cancellation device 1 having a vibration cancellation mechanism 9 supporting the object 13 to be damped in the...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
16.08.2007
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a vibration cancellation device capable of damping an object to be damped operated in a vacuum atmosphere by a simple structure. SOLUTION: In this vibration cancellation device 1 having a vibration cancellation mechanism 9 supporting the object 13 to be damped in the vacuum atmosphere, the mechanism 9 comprises a bellows joined body 15 which has a plurality of metal bellows 23, 27 with a support part 25 so interposed therebetween as to allow the metal bellows to communicate with each other and in which air is enclosed and a horizontal spring member 17 having one end fitted to the side surface of the support part 25 and elastically supporting the support part 25 in the direction perpendicular to the axial direction of the bellows joined body 15. COPYRIGHT: (C)2007,JPO&INPIT |
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Bibliography: | Application Number: JP20060028320 |