SUBSTRATE HOLDER PART AND FILM DEPOSITION SYSTEM

• Main Authors: YAMADA ATSUTOSHI, ASANO MASAAKI
• Format: Patent
• Language: English
• Published: 16.08.2007
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DIFFUSION TREATMENT OF METALLIC MATERIAL; FREQUENCY-CHANGING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To provide a substrate holder part for holding a treatment substrate used for a film deposition system where, under a state in which a treatment substrate is held to the substrate holder part and is mounted on a carrier, as it is carried including a carrier inline, a film is deposited on one face side of the treatment substrate, with which, even if vibration is generated in a carrier system, damage such as flaws and cracks is not generated by the vibration in the contact face part where the treatment substrate is contacted with each pin for supporting the treatment substrate, and further, stains and flaws which can not be viewed are not stuck to the surface contacted with each pin in the treatment substrate. SOLUTION: In the substrate holder part, one face side of a treatment substrate is supported by a plurality of supporting pins in a state of being contacted with the treatment substrate. The supporting pins each have a pin shape where the surface part on the side in contact with the treatment substrate is formed of a flexible fiber member, so as to support the treatment substrate. COPYRIGHT: (C)2007,JPO&INPIT