CHARGED PARTICLE BEAM DEVICE AND PICK-UP METHOD OF TEST PIECE USING CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a sure and easy pick-up method of a minute test piece. SOLUTION: This relates to the pick-up method of the minute test piece in charged particle beam device in which a minute test piece and a manipulator are held by a beam assisting deposition film formed by irradiat...

Full description

Saved in:
Bibliographic Details
Main Authors MADOKORO YUICHI, ONISHI TAKESHI
Format Patent
LanguageEnglish
Published 02.08.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To provide a sure and easy pick-up method of a minute test piece. SOLUTION: This relates to the pick-up method of the minute test piece in charged particle beam device in which a minute test piece and a manipulator are held by a beam assisting deposition film formed by irradiating charged particle beam while supplying a deposition gas, and the minute test piece and the manipulator are separated by removing the beam assisting deposition film by irradiating the charged particle beam while supplying an etching gas. For example, when a manipulator probe and the minute test piece are connected by the beam assisting deposition film having carbon as a main component, and after fixing to the carrier, the prove and the minute test piece are separated, the assisting deposition film is selectively etched by the beam assisting etching using an assistant gas having water as a main component. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20060011826