REDUCED PRESSURE TREATMENT APPARATUS

• Main Authors: TAKASE SHINJI, SHO YOSHIAKI, KAJIMA ATSUO
• Format: Patent
• Language: English
• Published: 17.05.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a reduced pressure treatment apparatus for forming a uniform coating over an enlarged glass substrate. SOLUTION: Sub exhaust pipes 9... extending along with an upper surface of a box-like main body 3 are branched from main exhaust pipes 8, 8, and suction parts 10......