REDUCED PRESSURE TREATMENT APPARATUS

PROBLEM TO BE SOLVED: To provide a reduced pressure treatment apparatus for forming a uniform coating over an enlarged glass substrate. SOLUTION: Sub exhaust pipes 9... extending along with an upper surface of a box-like main body 3 are branched from main exhaust pipes 8, 8, and suction parts 10......

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Bibliographic Details
Main Authors TAKASE SHINJI, SHO YOSHIAKI, KAJIMA ATSUO
Format Patent
LanguageEnglish
Published 17.05.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a reduced pressure treatment apparatus for forming a uniform coating over an enlarged glass substrate. SOLUTION: Sub exhaust pipes 9... extending along with an upper surface of a box-like main body 3 are branched from main exhaust pipes 8, 8, and suction parts 10... opened in a reduced pressure treatment space within the box-like main body 3 are attached on the tips of the sub exhaust pipes 9. These suction parts 10... are provided at horizontally symmetric positions with an axial line L as a reference in a plane view. By disposing the suction parts 10... at such positions, even if the inside of the reduced pressure treatment space is evacuated in a short time, trouble such as temperature non-uniformity does not occur. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20050315534