COATING APPARATUS AND METHOD
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of easily determining a parallel reference and a height reference of a slit nozzle and precisely performing a fine adjustment of a distance between a surface of a substrate and a lower end of the slit nozzle during coating. SOLUTION: The c...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
05.04.2007
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Subjects | |
Online Access | Get full text |
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