ARTICULATED CONVEYER AND SEMICONDUCTOR MANUFACTURING APPARATUS USING IT

• Main Authors: SUGANO WATARU, SHIMADA SHIGEMI, OTSUKI TAKAYUKI, SUMINO MASAHITO, TAUCHI KAZUHIRO
• Format: Patent
• Language: English
• Published: 15.02.2007
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; HANDLING THIN OR FILAMENTARY MATERIAL; MANIPULATORS; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a articulated conveyer, easily controlling the synchronous operation of the respective motors, saving on wiring, and reduced in size. SOLUTION: In this articulated conveyer, a plurality of arms 22, .., 52 are connected to each other to rotate through joints, a plurality of direct drive type motors 210, ..., 510 are installed at the joints, and the respective arms are rotated by the drive of each motor of the two or more motors to convey a body to be conveyed, which is loaded on the last arm. The conveyer includes: a control device 11 for converting an electric signal required for controlling the respective motors to a light signal and transmitting the same; signal converters 21, ..., 41 for converting the light signal to the electric signal and converting the electric signal to the light signal; and an optical communication means 113 for transmitting the light signal from the control device to the signal converter, wherein the respective motors are driven by the electric signal converted by the signal converter, and the drive of the respective motor is controlled according to the electric signal from the motors. COPYRIGHT: (C)2007,JPO&INPIT