ON-BOARD MEASURING METHOD OF SHAPE ERROR OF MICRO RECESSED SURFACE SHAPE, AND MEASURING DEVICE

• Main Author: YAZAWA TAKAAKI
• Format: Patent
• Language: English
• Published: 08.02.2007
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide an on-board measuring method of a shape error of a micro recessed surface shape capable of measuring the shape error of a micro recessed surface in non-contact at high speed and high accuracy, and also to provide its measuring device. SOLUTION: The measuring device comprises: an objective lens 23 facing the micro recessed surface 22; a light source module 25 for emitting converged light; a lens barrel 28 for making the optical axis 26 of the converged light and the axial center 27 common; an imaging element 29; a micro lens array 31 arranged between the lens barrel 28 and the imaging element 29; and a computer. The lens barrel 28 has two lenses 41 and 42 having a confocal, and a pinhole 44 arranged at the confocal. A measuring system is constituted so as to match condensing position of the converged light condensed through the objective lens 23 with the center of curvature of the micro recessed surface 22. The shape error of the micro recessed surface 22 is calculated based on the difference between the center of gravity position of each of light columns that are reflected from the micro recessed surface and formed on the imaging element 29 by the micro lens array 31 and the center of gravity position of a light column when a previously determined micro recessed surface 22 has an ideal shape. COPYRIGHT: (C)2007,JPO&INPIT