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Summary:PROBLEM TO BE SOLVED: To provide an illuminator equipped with a ring-shaped light source where a plurality of LEDs are arranged like a ring, wherein the irradiation angle of light from the ring-shaped light source can be changed. SOLUTION: The illuminator 1 includes: the ring-shaped light source 5 where the plurality of LEDs 4 are arranged like a ring; and a spherical mirror 6 which reflects light emitted from the LED 4 to a work 3 being an object to be inspected. The spherical mirror 6 has a through-hole 6h through which the image of the work 3 is taken by a camera 2 from the opposite side of the spherical mirror 6, and the work 3 is imaged by the camera 2 through the through-hole 6h of the spherical mirror. The spherical mirror 6 is arranged inside the ring of the ring-shaped light source 5, and freely moves in the direction of the ring axial center Z of the ring-shaped light source 5. By moving the spherical mirror 6 in the direction of the ring axial center Z of the ring-shaped light source 5, the irradiation angle of the light to the work 3 can be changed and can be set to an appropriate angle. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20050180277