X-RAY ANALYZER

• Main Authors: MITAMURA SHIGEHIRO, SOEJIMA HIROYOSHI
• Format: Patent
• Language: English
• Published: 14.12.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; GAMMA RAY OR X-RAY MICROSCOPES; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; IRRADIATION DEVICES; MEASURING; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; PHYSICS; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR; TESTING

PROBLEM TO BE SOLVED: To improve detection sensitivity and wavelength resolution, by simple modification in an existing wavelength dispersive X-ray analyzer using a Johansson type X-ray spectroscope. SOLUTION: A curved crystal arranged on a Rowland circle 5 is substituted with a plane crystal 6, and a point/parallel type multicapillary X-ray lens 4 is interposed between a sample 2 and the plane crystal 6 to provide a point focal point in an incident end face side and to emit a parallel beam in an emission end face side. A characteristic X-ray emitted from a micro area 3 on the sample 2 in response to irradiation of an electron beam is collected efficiently by the X-ray lens 4 to be converted into a parallel beam, and the X-rays of the same wavelength are diffracted by the plane crystal 6 to be brought into a parallel beam, and is analyzed by an X-ray detector 8. A conventional mechanism of fixing the micro area 3, and of moving the plane crystal 6 and the X-ray detector 8 along the Rowland circle 5 may be used, as it is, in wavelength scanning. COPYRIGHT: (C)2007,JPO&INPIT