WAFER TRANSFER DEVICE

PROBLEM TO BE SOLVED: To provide a wafer transfer device with an alignment function capable of reducing its footprint to an irreducible minimum, producing dust little, and being kept high in throughput, without having to use a wafer alignment dedicated unit or a wafer alignment actuator. SOLUTION: T...

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Bibliographic Details
Main Author SUMINO MASAHITO
Format Patent
LanguageEnglish
Published 07.12.2006
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
HANDLING THIN OR FILAMENTARY MATERIAL
MANIPULATORS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a wafer transfer device with an alignment function capable of reducing its footprint to an irreducible minimum, producing dust little, and being kept high in throughput, without having to use a wafer alignment dedicated unit or a wafer alignment actuator. SOLUTION: The wafer transfer device is equipped with a wafer holder 41 holding a wafer, an arm 40 supporting the wafer holder 41, and a stand 1. The stand 1 is equipped with a stand pad 10, and a turning base shaft 3 which supports the arm 40 fixing it, and is set rotatable about the stand pad 10. The wafer holder 41 is equipped with a position detecting sensor 5 which detects the reference position of the wafer, such as notches or orientation flats, and a wafer-mounting pad 11 with the wafer placed thereon is provided to the stand 1 so as to position the turning shaft 3 on the axis of rotation. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20050156151