FINE STRUCTURE PATTERNING METHOD

PROBLEM TO BE SOLVED: To provide a fine structure patterning method capable of preparing a uniform pattern into large area by easily solidifying various kinds and properties of substance fluids. SOLUTION: By this method, a fine structure pattern is formed by making fluid flow into a fine flow passag...

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Bibliographic Details
Main Authors IMASU JUNKO, SAKKA YOSHIO, FUDOJI HIROSHI
Format Patent
LanguageEnglish
Published 07.12.2006
Subjects
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a fine structure patterning method capable of preparing a uniform pattern into large area by easily solidifying various kinds and properties of substance fluids. SOLUTION: By this method, a fine structure pattern is formed by making fluid flow into a fine flow passage by a capillary phenomenon and fixing at least one kind of fluid component in a flow passage. The method includes (1) a process for making flow the fluid containing a component to be fixed in the flow passage, and (2) a process for making permeable liquid flow into the flow passage to further move the fluid in the flow passage to the back in the flow passage. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20050150238