ACTUATOR DEVICE AND ITS ACTUATING METHOD

PROBLEM TO BE SOLVED: To provide an actuator device and its actuating method. SOLUTION: The actuator device comprises: a part for generating an actuator control signal by pulse width modulation with an actuator drive signal and predetermined carrier signal in an electrostatic actuator which controls...

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Bibliographic Details
Main Authors RI SHINKO, HONG SEUNG-BUM, MIN DONG-KI
Format Patent
LanguageEnglish
Published 26.10.2006
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
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Summary:PROBLEM TO BE SOLVED: To provide an actuator device and its actuating method. SOLUTION: The actuator device comprises: a part for generating an actuator control signal by pulse width modulation with an actuator drive signal and predetermined carrier signal in an electrostatic actuator which controls the displacement of an object to be controlled by adjusting a voltage between a fixed comb electrode and a moving comb electrode; and an actuator provided with the fixed comb electrode and the moving comb electrode and adjusting the voltage with the actuator control signal. Thereby, even when the voltage of the actuator drive signal is high and the frequency of the carrier signal is high, the control can be easily performed by actuator drive signal with modulated pulse. COPYRIGHT: (C)2007,JPO&INPIT
Bibliography:Application Number: JP20060106630