MANUFACTURING METHOD OF OPTICAL ELEMENT

• Main Authors: JINRIKI TAKASHI, YAMAMOTO FUTOSHI
• Format: Patent
• Language: English
• Published: 19.10.2006
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical element using a thin plate having a rugged part formed on the surface of a substrate by dry etching and the like, wherein the surface of the substrate which lacks Li by its external diffusion is repaired and breakage of the substrate is suppressed. SOLUTION: In the manufacturing method of the optical element having the substrate formed by using a material having an electrooptical effect and having the rugged part formed on the surface thereof and ≤30 μm thickness, (2) the rugged part is formed on the surface of the substrate in the state that the substrate has ≥200 μm thickness, (3) then thermal treatment is performed and (4) then the rear surface of the substrate is polished so that the substrate may have ≤30 μm thickness. COPYRIGHT: (C)2007,JPO&INPIT