THIN FILM MAGNETIC HEAD AND METHOD FOR MANUFACTURING SAME

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film magnetic head improved in CMP accuracy by preparing a stopper film. SOLUTION: The stopper film 8 consisting of Si oxide or diamond-like carbon on is formed on a 1st alumina film 7 formed on a magnetic substance pattern 6, and a...

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Bibliographic Details
Main Authors KUMAZAWA YUJI, KOJIMA MICHIYOSHI, YAMASAKA MINORU, ETO KIMITOSHI
Format Patent
LanguageEnglish
Published 14.09.2006
Subjects
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
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Summary:PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film magnetic head improved in CMP accuracy by preparing a stopper film. SOLUTION: The stopper film 8 consisting of Si oxide or diamond-like carbon on is formed on a 1st alumina film 7 formed on a magnetic substance pattern 6, and a 2nd alumina film 9 is formed on the stopper film. After that, polishing is performed up to the stopper film 8 by CMP. The method for manufacturing the thin film magnetic head includes a process for forming a 2nd magnetic substance pattern 9 on an upper part of a flat surface formed by CMP processing. COPYRIGHT: (C)2006,JPO&NCIPI
Bibliography:Application Number: JP20050060786