ELECTRON DEVICE EQUIPPED WITH NON-EVAPORATING GETTER, AND MANUFACTURING METHOD OF ELECTRON DEVICE

• Main Authors: NAMIKAWA MAMORU, IDOHARA OSAMU, KAWASAKI KAZUHIRO, FUJIMURA YOHEI, YOKOTA SEIJI, ITO SHIGEO, TAKAYAMA SADANORI, MARUSHIMA YOSHIHISA, TANIGUCHI MASATERU, TONEGAWA TAKESHI, INOUE YOSHIAKI, KUBO YASUMOTO, NAWAMAKI KENJI
• Format: Patent
• Language: English
• Published: 31.08.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a non-evaporating getter material suitable for a getter in an electron device such as a fluorescent arc tube having a non-evaporating getter inside. SOLUTION: The non-evaporating getter material (ZrV) of raw material ( test piece A) is pulverized by a jet mill method and a test piece B is manufactured, and by pulverizing the test piece B by a bead mill method, a test piece C and a test piece D are manufactured. The test piece D is pulverized for a longer time than the test piece C. The particles of the test piece C and test piece D are scale-like and the specific surface area becomes very much larger than that of the test piece A and test piece B. The test piece C and the test piece D absorb gas at lower temperatures and much more than the test piece A and test piece B. COPYRIGHT: (C)2006,JPO&NCIPI