MANUFACTURING METHOD OF THIN FILM MAGNETIC HEAD

• Main Authors: YAMAKURA HIDEO, TAKAKURA AKIO, KOJIMA TOMOKATSU
• Format: Patent
• Language: English
• Published: 24.08.2006
• Subjects: INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; PHYSICS

PROBLEM TO BE SOLVED: To process the height of an MR element with an accuracy of ±0.020 μm or less in order to improve an output characteristic of the magneto-resistance effect element (MR element) of a magnetic head slider. SOLUTION: A combination of a plurality of upper and lower shafts 27 which are perpendicularly displaced by two flat springs and a plurality of load adding mechanisms 19 for loading the upper and lower shafts 27 individually with a polishing load via an adaptor 20 is fixedly arranged on a head polishing positioning mechanism 16 at a predetermined pitch, and each bottom end part of the upper and lower shafts 27 is made to hold the magnetic head slider 1 individually via an adhesive elastic body 29 to pressurize a polishing batholith 15, and the polishing load is individually controlled while detecting a resistance value of the MR element of each magnetic head slider 1 by a resistance detecting circuit substrate 31 in process of being polished. Thus, it becomes possible to attain an accuracy of ±0.010 μm or less for the height of the MR element, and a reproduction output of the MR element is stabilized, and also a yield of an MR manufacturing process can be improved. COPYRIGHT: (C)2006,JPO&NCIPI