THIN-FILM CAPACITOR, VARIABLE CAPACITOR, AND ELECTRONIC COMPONENT

PROBLEM TO BE SOLVED: To provide a thin-film capacitor and a variable capacitor having excellent moisture-resistance reliability, and electronic components using them. SOLUTION: The thin-film capacitor has a capacitance generation section which consists of sequential deposits of a lower electrode la...

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Bibliographic Details
Main Authors TAKI KENJI, KURIOKA HIDEJI, IIOKA ATSUHIRO, KUSABE KAZUHIRO
Format Patent
LanguageEnglish
Published 27.07.2006
Subjects
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide a thin-film capacitor and a variable capacitor having excellent moisture-resistance reliability, and electronic components using them. SOLUTION: The thin-film capacitor has a capacitance generation section which consists of sequential deposits of a lower electrode layer 2, dielectric layer 3, and an upper electrode layer 4 on a support substrate 1, and is covered with an insulator layer 5, wherein at least one of the lower and upper electrode layers 2 and 4 has a top lower than a bottom, and sides as slopes having streaky, continuous irregularity in a vertical direction. Thus, the insulator layer 5 is effectively prevented from being peeled from sides of the lower and upper electrode layers 2 and 4, resulting in high moisture-resistance reliability. COPYRIGHT: (C)2006,JPO&NCIPI
Bibliography:Application Number: JP20050328559