MEMBER SWITCHING APPARATUS, LENS SWITCHING APPARATUS, LASER REPAIR APPARATUS AND LASER INSPECTING APPARATUS

• Main Author: NOZAKI MASAKAZU
• Format: Patent
• Language: English
• Published: 20.07.2006
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To provide a member switching apparatus, a lens switching apparatus, a laser repair apparatus furnished with the lens switching apparatus and a laser inspecting apparatus, where such a member as a lens is positioned accurately and positional deviation is quickly resolved, using a simple mechanism, even when a positional deviation occurs. SOLUTION: A linear motor table 5 is provided in the lens switching apparatus 3 of the laser repair apparatus 1. The linear motor table 5 is fixed on a table 2 and a laser oscillation apparatus 4, and moves a lens holder 6 in the horizontal direction. Further, six objective lenses 7a through 7f, each having powers different from one another are provided and held in line on the lens holder 6 so that the optical axes are in parallel to each another. The objective lens which is to be inserted into the optical path of laser light 12 is switched, by moving the lens holder 6 by means of the linear motor table 5. COPYRIGHT: (C)2006,JPO&NCIPI