SCANNING TRANSMISSION ELECTRON MICROSCOPE, ABERRATION MEASURING METHOD, AND ABERRATION CORRECTION METHOD

PROBLEM TO BE SOLVED: To provide a scanning transmission electron microscope capable of obtaining a scanning transmission image having a specified resolution by deciding an aberration coefficient from Ronchigram and applying feedback of signals correcting each aberration to a device. SOLUTION: On th...

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Bibliographic Details
Main Authors NAKAMURA TAISUKE, NAKAMURA KUNIYASU
Format Patent
LanguageEnglish
Published 29.06.2006
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide a scanning transmission electron microscope capable of obtaining a scanning transmission image having a specified resolution by deciding an aberration coefficient from Ronchigram and applying feedback of signals correcting each aberration to a device. SOLUTION: On the scanning transmission electron microscope composed of an electron beam source 1, a conversion lens 3, a scan coil 7, a dark-field image detection device 13, an A/D converter, and a CPU 21 or the like, an aberration correction device 5 is mounted at a front stage of an objective front magnetic field lens 8, and driving current of each lens and the aberration correcting device are calculated and fed back by the aberration coefficient decided by a fitting of the Ronchigram obtained by a camera 15 and a calculated image against optional structure. COPYRIGHT: (C)2006,JPO&NCIPI
Bibliography:Application Number: JP20040367002