PRESSURE SENSOR

• Main Author: KOIKE HARUHISA
• Format: Patent
• Language: English
• Published: 29.06.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To reduce a detection error caused by a temperature difference between oils in both pressure detecting chambers, to the utmost, in a pressure sensor provided with the pressure detecting chambers with oils sealed in one face side and the other face side of a case by diaphragms, and for detecting pressure based on internal pressures of the both pressure detecting chambers. SOLUTION: In this pressure sensor S1 provided with a sensor element 20 provided in the case 10, the first pressure detecting chamber 11a provided in the one face side of the case 10, and having the oil 70 sealed in its inside by the first diaphragm 81, the second pressure detecting chamber 11b provided in the other face side of the case 10, and having the oil 70 sealed in its inside by the second diaphragm 82, a heat conductive member 200 comprising metal or the like for securing heat conductivity between the oils 70 of the pressure detecting chambers 11a, 11b is embedded in the case 10 to connect thermally the oils 70 of the pressure detecting chambers 11a, 11b by the heat conductive member 200. COPYRIGHT: (C)2006,JPO&NCIPI