PRESSURE SENSOR

• Main Authors: NOMURA TAKASHI, KOIKE HARUHISA
• Format: Patent
• Language: English
• Published: 29.06.2006
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To prevent to the utmost a pressure port from being deformed by a stress from an O-ring, when exposed to a high temperature, to fluctuate a sensor characteristic, in a pressure sensor with a pressure detecting chamber of a case sealed by pressing to the case a diaphragm bonded to the pressure port via the O-ring. SOLUTION: In this pressure sensor provided with a sensor element 20 in the pressure detecting chamber 11 of the case 10, and assembled with the pressure ports 12, 13 pressed to the O-ring 90 via the diaphragms 81, 82, to seal the pressure detecting chamber 11 by the diaphragms 81, 82 and the O-ring 90, a plate member 200 of rigidity higher than those of the pressure ports 12, 13 interposed between the pressure ports 12, 13 and the O-ring 90 is provided as a deformation preventing means in a portion with the pressure ports 12, 13 pressed to the O-ring 90 via the diaphragms 81, 82. COPYRIGHT: (C)2006,JPO&NCIPI