SUBSTRATE COATING SYSTEM

PROBLEM TO BE SOLVED: To provide a novel substrate coating system capable of inspecting whether or not a foreign matter exists on a surface of the substrate and continuing action of the whole of the system regardless of existence of the foreign matter. SOLUTION: This substrate coating system has a t...

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Bibliographic Details
Main Authors IWADE TAKU, HARA YOSHIYUKI
Format Patent
LanguageEnglish
Published 27.04.2006
Subjects
APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
PERFORMING OPERATIONS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a novel substrate coating system capable of inspecting whether or not a foreign matter exists on a surface of the substrate and continuing action of the whole of the system regardless of existence of the foreign matter. SOLUTION: This substrate coating system has a table member 3 for supporting a flat plate-like substrate 4; a coating means 2 for coating an upper surface of the substrate supported on the table member with a fluid; a foreign matter existence detection means 5, 6 for detecting existence of the foreign matter on the surface of the substrate supported on the table member; and a foreign matter existence detection time treatment means CTR for moving the coating means in a direction leaving from the substrate supported on the table member in response to detection of the existence of the foreign matter. COPYRIGHT: (C)2006,JPO&NCIPI
Bibliography:Application Number: JP20040301738