EXCIMER LAMP APPARATUS

PROBLEM TO BE SOLVED: To provide an excimer lamp apparatus with high reliability simply and safely carrying out exchange even in a long length lamp exceeding 1000mm and evading soiling of the interior of a lamp house or a conveyor chamber. SOLUTION: An excimer lamp is stored in the lamp house and ul...

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Bibliographic Details
Main Authors FUSHITSUGU HIDEKI, MURAKAMI SATOSHI, HIROSE KENICHI
Format Patent
LanguageEnglish
Published 20.04.2006
Subjects
BLASTING
FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF
HEATING
INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21Sand F21V, RELATING TO THEFORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THELIGHT EMITTED
LIGHTING
MECHANICAL ENGINEERING
STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To provide an excimer lamp apparatus with high reliability simply and safely carrying out exchange even in a long length lamp exceeding 1000mm and evading soiling of the interior of a lamp house or a conveyor chamber. SOLUTION: An excimer lamp is stored in the lamp house and ultraviolet rays are radiated outside from the lamp in the excimer lamp apparatus. A plurality of plate frames (110) lined up in parallel in the lamp house (10), a unit (120) fabricated into an approximate rectangular box shape with a lamp storing part (125) formed on a bottom part and the excimer lamp (121) stored in the lamp storing part are provided. The unit (120) is inserted between the frames (110 and 110) installed facing each other and supported to be able to be extracted by the frames (110 and 110). COPYRIGHT: (C)2006,JPO&NCIPI
Bibliography:Application Number: JP20050142792