STRAIN-CAUSING BODY, PHYSICAL QUANTITY/ELECTRICAL QUANTITY CONVERTER, AND MANUFACTURING METHOD OF THE STRAIN-CAUSING BODY

• Main Authors: KANEHIRA MITSUTAKA, ANADA TAKAHIRO
• Format: Patent
• Language: English
• Published: 20.04.2006
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To miniaturize a physical quantity/electric quantity converter that can reduce interference to a very low level, has high yield of manufacturing, can reduce the manufacturing period, can be mass-produced inexpensively, and has high durability, high-frequency characteristics and high responsiveness. SOLUTION: This strain-causing body 14 is formed, by sequentially stacking a strain-causing plate 31, a spacer plate 32, a weight plate 33, another spacer plate 32, and another strain-causing plate 31 starting from below to above, and integrating them through diffusion bonding. In the spacer plate 32, originally interconnected annular section 32 and small disk section 32b are integrated by diffusion bonding, the connecting part is then cut, and they are separated from each other. Also in the weight plate 33, although an annular section 33a and a large disk section 35b have originally been interconnected, they are integrated by diffusion bonding, and then are separated from each other by cutting. In the strain-causing plate 31, a small disk section 31b, a plurality of beam sections 31c, and a plurality of strain-causing parts 31d and 31e for receiving acceleration to cause strain are formed integrally and very thin. COPYRIGHT: (C)2006,JPO&NCIPI