OPTICAL MODULATOR AND MANUFACTURING METHOD THEREOF

• Main Authors: JINRIKI TAKASHI, YAMAZAKI MASAHIRO, SUGAMATA TORU, KURIHARA MASANAO, ENDO MUNENORI
• Format: Patent
• Language: English
• Published: 13.04.2006
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To provide an optical modulator which is capable of forming an appropriate film body on a substrate surface including a level difference part and has improved various kinds of characteristics of the optical modulator, such as the suppression of DC drift phenomenon with respect to the optical modulator having the level difference part on the substrate surface, and to provide a production method of the optical modulator. SOLUTION: In the optical modulator comprising the substrate 1 having electro-optical effect, an optical waveguide formed on the substrate and an electrode for control for modulating/controlling the optical waves that propagate in the optical waveguide, wherein a level difference part is formed on the substrate surface, the film body is formed on the region, including the level difference part and the film body formed on the side surface of the level difference part is formed of a dense film body which is equal to or denser than the film body formed on the upper surface of the level difference part. COPYRIGHT: (C)2006,JPO&NCIPI