PHOTOMASK, AND METHOD AND DEVICE FOR CLEANING THE SAME
PROBLEM TO BE SOLVED: To provide a photomask configured to attach and detach two half pellicle frames without using a magnetic body. SOLUTION: The photomask has a mask substrate where an electronic circuit pattern used to manufacture a semiconductor device is drawn, a lower frame bonded onto the mas...
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Main Author | |
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Format | Patent |
Language | English |
Published |
06.04.2006
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Subjects | |
Online Access | Get full text |
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