ELECTRON EMISSION SOURCE

• Main Authors: TERUI YOSHINORI, NONOGAKI RYOZO, SAKAWA MORIKAZU
• Format: Patent
• Language: English
• Published: 02.02.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide an electron emission source suitable for an electron beam exposure device or an Auger electron spectroscope, in which total radiation current amount is small even at a high angle current density operation. SOLUTION: This is the electron emission source equipped with a cathode installed with a supply source in order to diffuse one kind or more of metal elements selected from a group consisting of groups 2A, 3A, and 4A on a single-crystal needle of tungsten or molybdenum, and a suppressor electrode having a hole to protrude the single-crystal needle. This is the electron emission source in which the end part of the single-crystal needle has a truncated conical shape having the total conical angle of 25° or more to 95° or less, wherein the position of the border part of the conical face of the end part of the single-crystal needle and the side face of the single-crystal needle is not more protruded than that of the hole of the suppressor electrode. COPYRIGHT: (C)2006,JPO&NCIPI