ELECTRON MICROSCOPE DEVICE

PROBLEM TO BE SOLVED: To provide an electron microscope device to carry out analysis of a substance having a periodic structure. SOLUTION: In the electron microscope device, at first a Fourier transformation image of a known period is obtained, and the relationship between the distance on the image...

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Bibliographic Details
Main Authors NAGAOKI ISAO, UEKI YASUMITSU, YOTSUTSUJI TAKAFUMI
Format Patent
LanguageEnglish
Published 02.12.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide an electron microscope device to carry out analysis of a substance having a periodic structure. SOLUTION: In the electron microscope device, at first a Fourier transformation image of a known period is obtained, and the relationship between the distance on the image and a pixel number is obtained, and this is made as the standard scale. Next, the Fourier transformation image of an analysis target material is obtained and the pixel number of the period of the analysis target is obtained. The size of the period of the analysis target is obtained by using the standard scale. Furthermore, the actual size of a micron marker to direct a prescribed size is obtained by using the standard scale. The micron marker of the obtained size is superimposed on the electron microscopic image and displayed. COPYRIGHT: (C)2006,JPO&NCIPI
Bibliography:Application Number: JP20040151829