WAVE FRONT COMPENSATING APPARATUS, WAVE FRONT COMPENSATION METHOD, PROGRAM AND RECORDING MEDIUM
PROBLEM TO BE SOLVED: To provide a wave front compensation apparatus capable of precisely compensating wave front, to provide a wave front compensation method, and to provide a program and a recording medium. SOLUTION: A wave front modulating device 40 modulates the phase of incident light to form a...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
20.10.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a wave front compensation apparatus capable of precisely compensating wave front, to provide a wave front compensation method, and to provide a program and a recording medium. SOLUTION: A wave front modulating device 40 modulates the phase of incident light to form a phase modulated light. A wave front detecting device 60 converts the phase modulated light into a multipoint spot image, photographs the multipoint spot image and sends out an image signal of the multipoint spot image to a control device 80. The control device 80 calculates the difference between the center of gravity of spots of the multipoint spot image and a reference center of gravity as a shift in the center of gravity and obtains a wave front equation, by applying a least square method to a relational equation between the shift of the center of gravity and a polynomial primary differential equation and calculating a polynomial weight coefficient. The control device 80 further calculates residual wave fronts for each control point, by substituting coordinates of respective controlling points for the wave front equation, obtains feedback control data and converts the feedback control data into a control signals by a look-up table. The control device 80 compensates a wave front 30 of the incident light and outputs an ideal wave front 70, by performing closed loop feedback of the control signals to the wave front modulating device 40. COPYRIGHT: (C)2006,JPO&NCIPI |
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Bibliography: | Application Number: JP20040110303 |