METHOD AND SYSTEM FOR DETERMINING ONE OR A PLURALITY OF CHARACTERISTICS OF SAMPLE

• Main Authors: PEI SHIYOU, XU ZHIWEI, SHI JIANOU, RZEPIELA JEFFREY, ALEXANDER JOHN
• Format: Patent
• Language: English
• Published: 06.10.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a main system that determines a small-number carrier dispersion length with regard to a sample such as semiconductor wafer and a contamination level in the sample based on this, and a subsystem that detects an electrically defective map of the sample. SOLUTION: The main system for determining characteristics of a sample is configured so as to radiate lights from light sources 10, 12 of different wavelengths to the sample 26 substantially at the same time. The lights of different wavelengths are modulated by a modulator 14 substantially at the same frequency. The main system is further configured so as to conduct at least two measurements on the sample 26. The small number carrier dispersion wavelength of the sample 26 is determined from the measurement and an absorption coefficient of the sample at the different wavelengths. The subsystem for detecting defects on the sample 26 is configured by accumulating charges at a plurality of positions on the surface of the sample 26. This subsystem is configured so as to measure the oscillation of a probe 22 at a plurality of positions. The defects on the sample 26 are detected by using the 2-dimensional map of the sample 26 created from a surface voltage measured. COPYRIGHT: (C)2006,JPO&NCIPI