VANE ROTARY TYPE VACUUM PUMP

PROBLEM TO BE SOLVED: To provide a vane rotary type vacuum pump, in which abrasion amount of a vane and an opposed sliding face is reduced to secure high reliability. SOLUTION: Since material of the vane is high-hardness carbon having 80 to 120 of high shore hardness, the abrasion of an inner wall o...

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Bibliographic Details
Main Authors SAKUTA ATSUSHI, ONO RYUICHI, SAWAI KIYOSHI, IIDA NOBORU, NAKAMOTO TATSUYA
Format Patent
LanguageEnglish
Published 06.10.2005
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide a vane rotary type vacuum pump, in which abrasion amount of a vane and an opposed sliding face is reduced to secure high reliability. SOLUTION: Since material of the vane is high-hardness carbon having 80 to 120 of high shore hardness, the abrasion of an inner wall of a cylinder 5 slid with a tip of the vane 8 or the abrasion of the surface of a slit 7 formed in a rotor 6 slid with a side face of the vane 8 is reduced, and crystal structure of the high-hardness carbon has directionality, so that the abrasion of the vane 8 itself is reduced. COPYRIGHT: (C)2006,JPO&NCIPI
Bibliography:Application Number: JP20040084911