SEAL PLATE OF VACUUM GATE VALVE AND SEAL MEMBER USED FOR THE SAME

PROBLEM TO BE SOLVED: To provide a seal plate of a vacuum gate valve and a seal member used for the seal plate which can ensure stable sealing for a long period of time without fear of, for example, leakage or peeling of an adhesive in the central region, even if a concentrated load is applied to th...

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Bibliographic Details
Main Authors TSUJI KAZUAKI, YOSHIDA TSUTOMU
Format Patent
LanguageEnglish
Published 15.09.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a seal plate of a vacuum gate valve and a seal member used for the seal plate which can ensure stable sealing for a long period of time without fear of, for example, leakage or peeling of an adhesive in the central region, even if a concentrated load is applied to the central region which is supported by an axis in a bonded seal used in semiconductor equipment. SOLUTION: The seal-face pressure is set almost constant between the central region supported by the axis 14 and both end regions R, S by making the protrusion toward the valve-seat-face 18 side of the seal member 24 formed by an elastic material low in parts corresponding to the central region Q of the gate opening 16, while making the protrusion high in both end regions R, S. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20040064323