SUBSTRATE CONVEYING SYSTEM

PROBLEM TO BE SOLVED: To provide a substrate conveying system capable of shortening tact of a manufacturing line by effectively shortening a time required for changing conveying attitude or the like of the substrate. SOLUTION: Respective attitude changing conveyors 21, 22 of the conveying attitude c...

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Bibliographic Details
Main Authors SUZUKI KENSAKU, WATANABE KAZUO
Format Patent
LanguageEnglish
Published 15.09.2005
Edition7
Subjects
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