SUBSTRATE CONVEYING SYSTEM

• Main Authors: SUZUKI KENSAKU, WATANABE KAZUO
• Format: Patent
• Language: English
• Published: 15.09.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a substrate conveying system capable of shortening tact of a manufacturing line by effectively shortening a time required for changing conveying attitude or the like of the substrate. SOLUTION: Respective attitude changing conveyors 21, 22 of the conveying attitude changing device 20 move the substrate Snconveyed in a horizontal attitude by horizontal conveying conveyors 11-1, 11-2 in a conveying direction in the horizontal attitude (Figure (a)). The respective attitude changing conveyors 21, 22 perform action (attitude changing action) in the same operation form from the receiving state corresponding to the horizontal attitude to the giving state corresponding to an inclined attitude and transfer the conveying attitude of the substrate Snfrom the horizontal attitude to the inclined attitude (Figure (b)). Thereafter, the respective attitude changing conveyors 21, 22 move the substrate Snin the conveying direction in the inclined attitude and give the substrate Snto the inclination conveying conveyor 31 (Figure (c)). When the substrate Sn completely passes through the attitude changing conveyors 21, 22 of the conveying attitude changing device 20, they are returned to the giving state to the receiving state in the order from the attitude changing conveyor becoming in the state where the substrate Snis not placed and it receives the subsequent substrate Sn+1(Figure (c), (d), (e)). COPYRIGHT: (C)2005,JPO&NCIPI