OPTICAL DEVICE, IMAGING APPARATUS AND INSPECTION DEVICE

• Main Author: OIDE TAKAHIRO
• Format: Patent
• Language: English
• Published: 08.09.2005
• Edition: 7
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

PROBLEM TO BE SOLVED: To provide an optical device by which a reflected image and a transmitted image are observed using a simple constitution, and to provide an imaging apparatus and an inspection device. SOLUTION: The imaging apparatus for imaging an FPD 1, using light transmitted through the FPD 1, is equipped with a vertical illumination light source 11; an objective 14 guiding the light from the light source 11 to the front of the FPD 1; a filter 20 arranged between the light source 11 and the FPD 1 and having a light-shielding part for shielding the center part from light and a light-transmitting part provided around the light-shielding part; a retroreflection sheet 23 arranged on the back side of the FPD 1 and retroreflecting the light in the same direction as an incident direction; and a camera 15 receiving transmitted light retroreflected by the sheet 23 and transmitted through the FPD 1. COPYRIGHT: (C)2005,JPO&NCIPI