OPTICAL DEVICE, IMAGING APPARATUS AND INSPECTION DEVICE
PROBLEM TO BE SOLVED: To provide an optical device by which a reflected image and a transmitted image are observed using a simple constitution, and to provide an imaging apparatus and an inspection device. SOLUTION: The imaging apparatus for imaging an FPD 1, using light transmitted through the FPD...
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Main Author | |
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Format | Patent |
Language | English |
Published |
08.09.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide an optical device by which a reflected image and a transmitted image are observed using a simple constitution, and to provide an imaging apparatus and an inspection device. SOLUTION: The imaging apparatus for imaging an FPD 1, using light transmitted through the FPD 1, is equipped with a vertical illumination light source 11; an objective 14 guiding the light from the light source 11 to the front of the FPD 1; a filter 20 arranged between the light source 11 and the FPD 1 and having a light-shielding part for shielding the center part from light and a light-transmitting part provided around the light-shielding part; a retroreflection sheet 23 arranged on the back side of the FPD 1 and retroreflecting the light in the same direction as an incident direction; and a camera 15 receiving transmitted light retroreflected by the sheet 23 and transmitted through the FPD 1. COPYRIGHT: (C)2005,JPO&NCIPI |
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Bibliography: | Application Number: JP20040047471 |