SUBSTRATE CONVEYING AND TRANSFERRING DEVICE

PROBLEM TO BE SOLVED: To provide a substrate conveying and transferring device capable of easily and surely handling a substrate by an inexpensive device constitution. SOLUTION: This substrate conveying and transferring device 1 has a cassette 2 having a plurality of steps of accommodation parts acc...

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Bibliographic Details
Main Author TASHIRO SHIGEYUKI
Format Patent
LanguageEnglish
Published 08.09.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a substrate conveying and transferring device capable of easily and surely handling a substrate by an inexpensive device constitution. SOLUTION: This substrate conveying and transferring device 1 has a cassette 2 having a plurality of steps of accommodation parts accommodating a substrate 11, a bogie 4 loading and conveying the cassette 2, and a lifter 6 arranged opposite to a substrate processing device for elevating the cassette 2. A frame 4a of the bogie 4 loading the cassette 2 is fitted with a frame 22 of a lifter 6, and a servomotor 30 is rotated to raise an elevation plate 21. Then, the cassette 2 is elevated and moved, so that a desired accommodation part is opposed to an entrance/exit of the substrate of the processing device. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20040051755