MICROPROBE, MANUFACTURING APPARATUS THEREOF, AND METHOD

PROBLEM TO BE SOLVED: To implement a microprobe having a useful protective layer on its surface. SOLUTION: A hydrogen-containing amorphous carbon (DLC) film layer is formed on the surface of a probe core material by means of high-frequency plasma chemical vapor deposition method, using a hydrocarbon...

Full description

Saved in:
Bibliographic Details
Main Authors WATANABE MAYU, TSUNODA NAOTO, YAMADA YUKIO, OKUYAMA NAOKI
Format Patent
LanguageEnglish
Published 02.09.2005
Edition7
Subjects
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PHYSICS
TESTING
THEIR RELEVANT APPARATUS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To implement a microprobe having a useful protective layer on its surface. SOLUTION: A hydrogen-containing amorphous carbon (DLC) film layer is formed on the surface of a probe core material by means of high-frequency plasma chemical vapor deposition method, using a hydrocarbon gas as a source gas to form an electricity-insulating and highly hard protective film layer of a uniform thickness in the microprobe. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20050041142