IDENTIFYING METHOD AND SYSTEM FOR POSITION OF STAGE USING TARGET IMAGES

PROBLEM TO BE SOLVED: To position correctly the stage for the use of indicating or preserving of products. SOLUTION: The position of a stage is identified. Some target images deployed on the stage concerned are acquired. By comparing those acquired target images concerned with the preserved images,...

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Bibliographic Details
Main Authors MUELLER LOUIS F, CHU DAVID C, RAY ALAN B, YOUNG JEFFREY A, BROSNAN MICHAEL JOHN, SCHLUCHTER WILLIAM C, WOOLVERTON DOUGLAS P
Format Patent
LanguageEnglish
Published 18.08.2005
Edition7
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Summary:PROBLEM TO BE SOLVED: To position correctly the stage for the use of indicating or preserving of products. SOLUTION: The position of a stage is identified. Some target images deployed on the stage concerned are acquired. By comparing those acquired target images concerned with the preserved images, displacement coordinates of each target are determined. The displacement coordinates of target concerned is converted into the position coordinates of the stage. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20050002317