POD CLAMP UNIT OF POD OPENER, POD CLAMP MECHANISM EMPLOYING POD CLAMP UNIT AND CLAMPING METHOD

PROBLEM TO BE SOLVED: To provide a clamp unit having no possibility of touching the lower surface of a pod when it is mounted on a mounting table at a load port. SOLUTION: The clamp unit 1 comprises a clamp member opening/closing cylinder 7 movable up and down, a pair of clamp members 3 having one e...

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Bibliographic Details
Main Authors MIYAJIMA TOSHIHIKO, EMOTO ATSUSHI, OKABE TSUTOMU
Format Patent
LanguageEnglish
Published 04.08.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a clamp unit having no possibility of touching the lower surface of a pod when it is mounted on a mounting table at a load port. SOLUTION: The clamp unit 1 comprises a clamp member opening/closing cylinder 7 movable up and down, a pair of clamp members 3 having one end part supported rotatably by the cylinder 7, and the other end part provided with a clamp part and a slide pin buried perpendicularly to the extending plane thereof, and a link 5 having an elongated hole being fitted with the slide pin. After a predetermined clamp attitude is brought about by driving the pair of clamp members 3 through the link 5 and the slide pin, the clamp member opening/closing cylinder 7 lowers by a predetermined amount. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20040016718